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PRODUCT 에어 플로팅 시스템

The Air Floating System uses compressed air to transport the material
to a non-contact conveying device

 

Air Floating System的 核心技术

· 多孔陶瓷 : 应对Office, 通过均压浮起移送对象(均匀的气孔率,透射率为必要条件)
· 抗静电功能 : 防止因静电引起的问题
· 提高刚性 : 弯曲强度 80 Mpa 以上的多孔质材料

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FPD Device Air Floating System

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Porous Air Floating System

Advantages of Air Floating

· 为了预防移送基盘时发生表面Scratch, 利用气浮系统
· Prevention from Mura Defect due to glass deformation due to flatness and heat imbalance

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Figure2. <a>Cluster Mura; <b>Vertical Band Mura 
            <c>Rubbing Mura; <d>Light Leak Mura

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Example of Mura Defect

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Porous Ceramic Floating System

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Orifice Type Floating System

Tri-N 拥有Orifce 及 Porous 形态的气浮系统设计及生产能力

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Air Floating Stage

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