The Air Floating System uses compressed air to transport the material
to a non-contact conveying device
Air Floating System的 核心技术
· 多孔陶瓷 : 应对Office, 通过均压浮起移送对象(均匀的气孔率,透射率为必要条件)
· 抗静电功能 : 防止因静电引起的问题
· 提高刚性 : 弯曲强度 80 Mpa 以上的多孔质材料
FPD Device Air Floating System
Porous Air Floating System
Advantages of Air Floating
· 为了预防移送基盘时发生表面Scratch, 利用气浮系统
· Prevention from Mura Defect due to glass deformation due to flatness and heat imbalance
Figure2. <a>Cluster Mura; <b>Vertical Band Mura
<c>Rubbing Mura; <d>Light Leak Mura
Example of Mura Defect
Porous Ceramic Floating System
Orifice Type Floating System
Tri-N 拥有Orifce 及 Porous 形态的气浮系统设计及生产能力